00406naa#a2200145#i#4500001001500000005001700015011001400032100004100046102000700087200003700094210007200131215001000203608002700213856002000240EN\\bibl\9739420250514233501.3##a2409-1073##a20241230b2024####ek#y0engy0150####ca##aRU1#aFOR THE AUTHORSeJournal article1#aMoscowcNational Research University of Electronic Technologyd2024##a1 с.##aJournal article2local4#aesgi-journal.ru