00861naa#a2200181#i#4500001001600000005001700016011001400033100004100047102000700088200013800095210007200233215001000305608002700315675026700342700002300609700002700632856002000659EN\\bibl\12295020260525154842.1##a2409-1073##a20230920b2023####ek#y0engy0150####ca##aRU1#aDefining directions for sustainability and development of microelectronic production based on general systems theoryeJournal article1#aMoscowcNational Research University of Electronic Technologyd2023##a0 с.##aJournal article2local##aУправление экономикой. 338.24aМеханическая конструкция, структурные материалы и компоненты. 621.3.049.7aФилософские системы по общей оценке мира. 141.2#1aGribkovgAndrey A.#1aZelenskygAlexander A.4#aesgi-journal.ru