00420naa#a2200157#i#4500001001600000005001700016011001400033100004100047101000800088102000700096200003000103210007200133215001000205608002700215856002000242EN\\bibl\12115220260423140804.4##a2409-1073##a20140604b2014####ek#y0engy0150####ca0#aENG##aRU1#aCONTENTSeJournal article1#aMoscowcNational Research University of Electronic Technologyd2014##a1 с.##aJournal article2local4#aesgi-journal.ru