00407naa#a2200145#i#4500001001600000005001700016011001400033100004100047102000700088200003700095210007200132215001000204608002700214856002000241EN\\bibl\12082420260506171304.3##a2409-1073##a20240620b2024####ek#y0engy0150####ca##aRU1#aFOR THE AUTHORSeJournal article1#aMoscowcNational Research University of Electronic Technologyd2024##a0 с.##aJournal article2local4#aesgi-journal.ru